Specialized gas treatment equipment and adsorption activated carbon for clean room
This equipment effectively remove the acid gas in the air of the clean room,such as hydrogen chloride 、 hydrogen fluoride、 Hydrogen bromide、Sulfur dioxide、hydrogen sulfide and acid ion like NO2-、NO3-、 PO43-,in order to assure the air quality of clean room will meet the safety criterion. Also Alkaline gas such as Ammonia and Alkaline ion like NH4+ can be removed too.